| 摘要 |
PURPOSE:To measure the characteristics of the surface of a specimen and that under the surface thereof, in a laser beam exciting analytical apparatus, by allowing laser beam to be incident on a specimen to be inspected and measuring the change in the refractive index of reflected laser beam to calculate the surface temp. of the specimen. CONSTITUTION:Laser beam 5 from a laser oscillator, for example, a CO2 laser oscillator 4 is incident on the specimen 1 to be inspected in a vacuum specimen case 2. For example, the specimen 1 to be inspected is GaAs. The laser beam 8 reflected from the incident point of said specimen 1 is incident on a laser output meter 7. At this time, the surface or the interior of the specimen 1 is heated by the laser beam and the temp. of the incident point changes. The refractive index of the reflected laser beam is changed by said temp. change and the change in the refractive index is detected. Because the surface temp. of the specimen to be inspected is calculated by detecting the refractive index, the geometrical structures of the surface or interior of the specimen or the material characteristics of the specimen can be measured in such a state that the effect of external noise is reduced.
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