| 摘要 |
PURPOSE:To obtain a measuring apparatus with a simple construction, by providing an exciting electrode for generating an elastic surface wave, a grating for reflecting the elastic surface wave generated from the exciting electrode and a detection electrode on one surface of a piezoelectric substrate. CONSTITUTION:When a DC voltage is applied to exciting electrodes 2 and 3, an elastic surface wave is excited. The elastic surface waveis excited by being reflected in respective directions 16 and 17 with gratings 7 and 6 while appearing as crest 18 at the portion (a) between detection electrodes 4 and 5. At this point, a coriolis force acts upon the portion of the crest 18 by an angular velocity vector 12. With the portion of the crest 18 subjected to the coriolis force 21, a compression strain is caused at the part (b) while a tension strain at the part (c) and these strains are detected with the electrodes 4 and 5 as voltage. The excitation voltage applied to electrodes 2 and 3 and the output voltage generated in the electrodes 4 and 5 shift by 90 deg. in the phase but made the same with a phase shifter. Thus, the output voltage signals in the electrodes 4 and 5 are detected to measure the angular velocity or a rotating object. |
