| 摘要 |
PURPOSE:To set a power exactly in a short time by comparing a set power which is set by a power setting means, and a power which detected by a power detecting means, and controlling a driving means so as to obtain the set power. CONSTITUTION:An angle signal which is outputted from an arithmetic processing circuit 7, and an angle signal of a rotational angle of an actually driven motor 4c, which is detected by an encoder are compared by an error counter 11 and their deviation is derived, the motor 4c is driven again in accordance with its deviation so as to obtain an actual set power and through a zoom lens 3 which is set, a pellet on an XY table in fetched as a video signal by an ITV camera 12 and an ITV driving circuit 13, a center position and an inclination, etc. of this pellet are recognized as a pattern from this video signal by a pattern recognizing circuit 14, a shift from a prescribed position is calculated, and the XY table is driven, and moved to a prescribed position. In this way, the power can be set in a short time. |
