A COPLANAR WAVEGUIDE PROBE

摘要

A coplaner waveguide probe (2) comprises a dielectric substrate (8) having a pattern of ground electrodes (4) and signal electrodes (6) arranged on one surface. An electrically conductive layer (12) is provided on a further surface of the substrate (8) in electrical contact with the ground electrodes (4). The electrical contact between the electrically conductive layer (12) and the ground electrodes (4) is provided by a series of via holes (18) containing electrically conductive material, such as gold or conductive epoxy (20), and/or extension portion of the electrically conductive layer (12).