发明名称 PREVENTION OF UNEVEN SPIN COATING AND SPIN COATER
摘要 PURPOSE:To reduce any uneven coating due to bubbles remarkably, forming coated films with excellent evenness, by a method wherein coating agent is dripped on the position distant from the rotary center of coated material. CONSTITUTION:The center B of nozzle 4 is arranged on the position distant by e from the rotary center A of a coated material 1. When coating agent 5 is dripped from a deflectively located nozzle 4, the dripped coating agent 5 is spread almost circularly on the position deflected from the rotary center A of coated material 1. The dripped amount of coating agent 5 shall be specified to get over the rotary center A toward the opposite side. When a spindle 3 is rotated, bubbles 6 are externally blown away rapidly together with the coating agent 5 disappearing from the coated material 1 since the bubbles 6 being distant from the rotary center A, the coating agent 5 around the bubbles 6 is subject to relatively intensive centrifugal force. Through these procedures, any uneven coating due to explosion of bubbles 6 can be reduced remarkably.
申请公布号 JPS61244029(A) 申请公布日期 1986.10.30
申请号 JP19850085639 申请日期 1985.04.22
申请人 TOSHIBA MACH CO LTD 发明人 TADA YOSHIAKI
分类号 B05D1/40;B05C11/08;G03F7/16;H01L21/027;H01L21/30 主分类号 B05D1/40
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