| 摘要 |
PURPOSE:To improve abrasion resistance at low cost for prevention of seizing, dragging and abrasion of an oscillating portion, by forming a body of a member which undergoes oscillation and forming an amorphous boron carbide film on the surface thereof. CONSTITUTION:A connecting rod 25 including its oscillating portion 25a is precisely processed and set on a base 22 within a reaction vessel 21. The inside of the reaction vessel 21 is evacuated to have a pressure of 10<-5> Torr, and the connecting rod is heated at about 300 deg.C. A B2H6 gas and a CH4 gas are introduced into the reaction vessel 21 through a gas introducing pipe 28, and a radiofrequency power is applied to an opposing electrode 23 with a radiofrequency power source 26. A plasma due to radicals containing boron and carbon is generated between the opposing electrode 23 and the base 21 to initiate formation of an amorphous boron carbide film on the oscillating portion 25a. After passing of a predetermined time, the radiofrequency power source 26 is shut off, and the introduction of the B2H6 gas and CH4 gas is stopped. A gas discharging valve 31 is opened, and the inside of the reaction vessel 21 is evacuated to have a pressure of 10<-4> Torr. After the temp. has been lowered, the connecting rod 25 is taken out in the air to complete the formation of the film. |
