| 摘要 |
PURPOSE:To omit focusing, by providing a lens on a substrate, on which electric measuring terminals of a semiconductor device are fixed. CONSTITUTION:A lens 3, by which parallel laser light rays 4 are focused 6, is provided on a substrate 1 having a plurality of probes 2. The laser light rays are projected to the lens 3 of the substrate 1, and the focus point 6 is formed on a wafer 5 by the lens 3. Thus a laser mark is provided. When a concave lens is used, the parallel light rays of a laser marker are diverged, and the size of the mark is made large. By attaching the lens to the substrate, the parallel light rays, which are emitted from the laser marker, are focused on the wafer through the lens. Therefore, the focusing adjustment is not required. |
