发明名称 OBSERVING DEVICE
摘要 PURPOSE:To observe interference fringes well by inserting a diffused reflection filter between an objective lens and a sample and moving this filter in an optional speed. CONSTITUTION:The light from a light source 1 such as a laser beam is collimated by an objective lens 2 and is reflected on a prism 3 and is irradiated to a sample 4. Parallel rays of light transmitted through the prism 3 are reflected on a mirror 5, and interference fringes between this reflected light and the reflected light from the sample 4 are formed an image on a television camera 7 through an objective lens 6. A diffused reflection filter 8 consisting of a frosted glass or the like provided with minute recessed and projected parts is inserted between the objective lens 2 and the prism 3, and this filter 8 is rotated at an optional speed in the direction orthogonal to parallel rays of light from the lens by a motor 9. Thus, the moire due to the diffused reflection filter itself is reduced to prevent the degradation of S/N of interference fringes due to the moire.
申请公布号 JPS61233302(A) 申请公布日期 1986.10.17
申请号 JP19850074031 申请日期 1985.04.08
申请人 SONY CORP 发明人 KANEKO SHINJI
分类号 G01M11/00;G01B9/02 主分类号 G01M11/00
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