| 摘要 |
PURPOSE:To produce a magnetic recording medium at a high speed with a magnetron sputtering process by using a target where ferromagnetic materials and other materials are arrayed flatly and alternately. CONSTITUTION:A ferromagnetic thin film is formed on a supporter with a magnetron sputtering process which makes use of the glow discharge that catches scattered secondary electrons by a line of magnetic force. In this case, a target is used. This target is obtained by arraying ferromagnetic materials 10 and other materials 11 of flat plate types alternately on a target holder 9. Thus the magnetic fields which catch the secondary electrons produced by a magnet group 12 are not affected by the materials 11 at all. This increases the effective magnetic fluxes. In such constitution, the sputtering fields are studied for both materials 10 and 11. Then the smaller conditions are selected for the materials 11 to increase the area occupied by the materials 11. As a result, the effective magnetic flux is increased further.
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