| 摘要 |
PURPOSE:To simply start a gas laser device in a short time and to reduce power loss by applying a high voltage pulse voltage at the prescribed time interval when a gas laser oscillator is started. CONSTITUTION:A gas laser oscillator has a discharge space 34 formed between a grounded anode 31 and a cathode 33 made of many pin electrodes 33a-33n. The electrodes 33a-33n are connected through ballast resistors 32a-32n with a high voltage pulse power source 23. A controller 21 applies a control signal S1 to a pulse generator 22 to generate a pulse train S having the prescribed time width and interval when the oscillator is started, and supplied to a pulse power source 23. The power source 23 generates high voltage pulses P1-P2 in response to a pulse train S2. A leakage resistance 35 between the electrode 33a and the anode 31 started by the pulse P1 is smaller than that between the pin electrode not initiated for a discharge and the anode 31; therefore, when a pulse P2 is applied, the pin electrodes except the electrode 33a starts discharging. When he all pin electrodes are started for discharging by the prescribed repetition of the pulses P1-P2, it is shifted to a rated operating DC voltage P3. |
