发明名称 |
Temperature gradient furnace for materials processing. |
摘要 |
<p>A cylindrically hollow segmented thermal gradient furnace enclosing metal or semiconductor material wherein each segment includes a heater for rainsing the temperature of the metal. The material is encircled by a heat pipe which is coupled to a heat exchanger for rapidly cooling a corresponding segment of the material after the heater has performed a thermal soak of the material. A reservoir is filled with inert gas which is selectively expanded to block cooling at the heat exchanger when the heater is turned on and compressed to allow cooling at the exchanger when the heater is turned off so that a sharp thermal gradient may be established along the length of the material.</p> |
申请公布号 |
EP0196243(A2) |
申请公布日期 |
1986.10.01 |
申请号 |
EP19860400349 |
申请日期 |
1986.02.19 |
申请人 |
GRUMMAN AEROSPACE CORPORATION |
发明人 |
HASLETT, ROBERT;HARWELL, WILLIAM |
分类号 |
C30B11/00;F27B5/14;F27B17/00;F27D9/00;F27D19/00;F28D15/06;H01L21/18 |
主分类号 |
C30B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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