| 摘要 |
PURPOSE:To eliminate the need for Invar and an Invar supporter, and to remove the damage of a laser tube due to a difference between the thermal expansion of Invar and the laser tube and the variation of an output by reinforcing a jacket for the laser tube, directly mounting a mirror head to the laser tube and supporting the mirror head. CONSTITUTION:A mirror head 25 is constituted from a mirror mount 1, a mirror flange 3 and a bellows 2 hermetically connecting the mirror flange 3 and the mirror mount 1. The mirror mount 1 has a cylindrical shape, a flange section 1a is formed on one end side thereof, and the end section of a laser tube 6 is inserted to the other end side thereof, and fixed hermetically by a sealing bond 21. One end of the bellows 2 is brazed on the flange section 1a side of the mirror mount 1 by hard solder, and the other end side of the bellows is brazed to the mirror flange 3. The mirror flange 3 is fastened to the flange section 1a in the mirror mount 1 in an adjustable manner by bolts 12, and a mirror 4 is held and settled between the mirror flange 3 and a mirror hold- down 5 through an 0 ring 13. |
