| 摘要 |
PURPOSE:To rapidly measure plasma three-dimensional distribution, by providing a beam introducing apparatus having optical groups arranged in a direction along laser beam in parallel and a beam detection apparatus having a linear beam detector connected to said beam introducing apparatus. CONSTITUTION:When laser beam 2' is introduced into a vacuum container 27 from the optical fiber 6 of a laser beam scanning apparatus 7 through a lens 11 and a window 14, the specific chemical seed in plasma present in laser beam 19 is excited to generate fluorescent beam 24. This fluorescent beam 24 is generated linearly along a laser beam irradiation path but, looking from the optical fiber groups 33 of a beam introducing apparatus 32, only the fluorescent beam 24 present in the beam receiving angle of each optical fiber is received by the optical fiber groups 33 and spectrally diffracted by the spectroscope of a beam detection apparatus 28 and only fluorescent beam with a specific wavelength is converted to an electric signal having magnitude proportional to the receiving quantity of fluorescent beam by a linear beam detector 35. Said signal is amplified by an amplifier 36 to be sent to a microcomputer 37. |
