| 摘要 |
PURPOSE:To control the temperature of a heater chip precisely by melting a part of the heater chip and the tip section of a thermocouple and mounting the thermocouple to the heater chip. CONSTITUTION:The tips of thermocouple wires 2' and 2'' are connected and supported in the vicinity of the center of the heating operation end 3 of a heater chip 1, and the intersection of the wires 2' and 2'' is irradiated by laser beams to form a thermocouple tip 4 while the thermocouple tip 4 is welded to the operation end 3, thus completing the heater chip with a desired thermocouple. According to the constitution, thermoelectromotive force generating pair sections in the thermocouple can be fitted where close by the heat generating section of the heater chip to be measured or the assembling operation end of a semiconductor device, and the thermocouple tips are joined directly with a heater chip proper. Consequently, thermal resistance in the joining sections can be reduced extremely, and the control of the temperature of the heater chip can be improved remarkably. |
