| 摘要 |
<p>PURPOSE:To facilitate recovery of expensive pellicle frames when defects of a pattern or pieces of dust are found on a reticle face, by dividing the pellicle frame into two step parts, and releasing the upper frame stretching a pellicle film only by peeling an adhesive tape joining the two frames. CONSTITUTION:The pellicle frames are divided into two parts, and a pellicle film 2 is stretched on the end face of the pellicle frame 1. The pellicle frame 1 has a fitting mechanism provided with a stepped part high in precision on the end face and fit to the pellicle frame 5 bonded to the reticle 3 to form both pellicle films 2 into parallel planes to a reticle plane 3, and then, the outer circumference of the frames 1, 5 are fixed with the adhesive tape 6, thus forming the parallel protective structure of of the upper and lower planes of the reticle 3. When the reticle 3 is checked for defects by using a projection exposure method and a detection wafer, and it is judged that it is off-grade, the pellicle frame 1 can be easily released from the frame 5 by peeling the adhesive tape 6, and the released frame can be reused.</p> |
