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发明名称
IMPROVED PULSED PLASMA PROCESS
摘要
申请公布号
EP0154483(A3)
申请公布日期
1986.08.20
申请号
EP19850301251
申请日期
1985.02.25
申请人
STC PLC
发明人
HEINECKE, RUDOLF AUGUST HERBERT;OJHA, SURESH MISHRILAL;LLEWELLYN, IAN PAUL
分类号
B01J19/08;C23C16/50;C23C16/515;C23F4/00;(IPC1-7):C23F4/00
主分类号
B01J19/08
代理机构
代理人
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地址
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