| 摘要 |
Thin silicon film is interposed between two electrodes, and has a barrier for separating photoionized electrons and positive holes. A solar cell comprises an electrode on a substrate and another electrode on thin silicon film. At least one of the electrodes is transparent. The silicon film has at least one barrier for separating photoionized electrons and positive holes. It consists of a mixed phase of polycrystalline phase and an amorphous phase. It contains at least 50% of fibrous crystal grains in volume ratio. The crystal grains have diam. of less than 1 .m and a height of more than 50nm. These grains are heated in plasmatic atm. to remove dangling bonds.
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