| 摘要 |
PURPOSE:To establish dry vacuum formation by feeding a sample from a frist sample chamber to a second sample chamber, achieving advance or retreat of a feed mechanism in a condition releasing it from engagement with a sample holder and introducing the sample from the second sample chamber to the first sample chamber. CONSTITUTION:A sample holder 4 provided in a sample chamber 1 is transferred to a sample exchangeable position. The sample chamber 1 is communicated by opening a gate valve 3 with the a sample replacing chamber 2 and a chuck/unchuck mechanism 13 is introduced, by switching the lever 13 (9) of the chuck mechanism 13, to the sample chamber 1. In this case, a roller 13 (8) at the top end of the chuck/unchuck lever 13 (2) meets with the slot of the sample holder 4 within the sample chamber 1, subsequently the sample holder 4 is drawn out to the sample replacing chamber 2 by reversely rotating a feed screw. The gate valve 3 is closed, the sample chamber 1 is separated in vacuum from the sample replacing chamber 2, subsequently the atmosphere introduced into the sample replacing chamber 2 is made equivalent to the atmospheric pressure, a lid 16 is opened by revolving it around a fulcrum 15 and a silicon wafer 5 is replaced. Thereby, dust generated in replacing the sample can be prevented and dry vacuum formation can be established.
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