| 摘要 |
PURPOSE:To make possible the formation of an information recording medium having a desired compsn. with good reproducibility without the change in film forming speed by sputtering a low melting metal by the plasma of a gaseous mixture contg. methane hydrocarbon and oxygen or a gaseous mixture composed of such gaseous mixture added with either hydrogen or argon thereby forming the recording medium. CONSTITUTION:The recording film deposited on a substrate is formed by sputtering a metallic target having <=600 deg.C m.p. by the plasma of the gaseous mixture contg. the methane hydrocarbon and oxygen as well as hydrogen and argon. The preferable mixing ratio of the methane hydrocarbon and oxygen is >=5%->=60% oxygen, at which the sputtering is executed.
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