METHOD AND INSTRUMENT FOR MEASURING IMPEDANCE

摘要

PURPOSE:To determine an unknown impedance value such as electric discharge impedance by detecting an amplitude ratio and phase difference from the voltage waveform when the end of a high-frequency power source to be connected to load is open and the voltage waveform when the unknown impedance is connected thereto and subjecting the same to arithmetic processing. CONSTITUTION:The sine wave of the high-frequency power source 2 is generated in synchronization with the clock signal of a clock generator 1 and the clock signal is inputted as an external trigger signal to a synchroscope 5. A high-frequency voltage probe 4 is connected to the point A. A coaxial switch 3 is connected to the side (a). The voltage at the point A is the sine wave of the amplitude E0 having no phase deviation with respect to the clock signal. The voltage at the point A is the sine wave of the amplitude V having the phase deviated by psi by the load (unknown impedance Z) 6 when the switch is connected to the side (b). The phase difference psi and amplitude ratio eta(V/E0) are measured and are inputted to an arithmetic means 7 and the value of the load impedance is easily determined by the equation.