发明名称 AUTOMATIC MEASURING/SELECTING APPARATUS FOR SEMICONDUCTOR
摘要 PURPOSE:To achieve a higher speed of an apparatus while enabling contact between an element to be measured and a measuring electrode with a sufficient strength and area by measuring the characteristic of the element being measured with a mobile electrode electrically linded to a socket with an extension lead and supported with an insulator and a fixed electrode to select it based on the results. CONSTITUTION:A mobile electrode 4 has a plurality of lower contactors 10 electrically linked to a socket 12 with an extension lead 14 and buried into an insulator 11. On the other hand, a fixed electrode 5 has an upper contactor 9 bent at the lower tip thereof held with an insulator 13. A conveying mechanism 1 is driven intermittently, then, an element 3 to be measured is striken into the mobile electrode 4 at the point (a) with a pusher 2 and the mobile electrode 4 bring in sliding contact with the fixed electrode 5 as moving holding the element 3 therein in contact therewith to measure the characteristic of the element 3 at the point (b). Further, the mobile electrode 4 moves to the point (c) to make an measurement with the element contacting the fixed electrode 6. At the point (d), based on the combination obtained by the measurement of the characteristic made twice, the element is stored, for example, into a box with a raking mechanism 7, defective products are raked out at the point (e) and those left at the point (f) are raked out to be sent to the sequent process.
申请公布号 JPS61169776(A) 申请公布日期 1986.07.31
申请号 JP19850009504 申请日期 1985.01.22
申请人 HITACHI LTD;HITACHI SETSUBI ENG KK 发明人 KANO HIDEO;SAKAI RYUICHIRO;KAWASAKI YOSHIFUMI;USHIWATARI TETSUO;KAMOSHITA TAMOTSU
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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