| 摘要 |
PURPOSE:To improve the precision of manual alignment, by a method wherein a photoirradiating part projects linear polarized light with a plurality of different wavelengths while an imagery optical system is constituted so that the linear polarizing direction may be rectangularly changed to the light with respective different wavelengths. CONSTITUTION:When a lamp 18 of a photo irradiating part 14 lights in case of manual alignment, linear polarized light with two different wavelengths is projected through a filter 19 and a polarized light filter 20 to irradiate a photomask 1 through a halfmirror 21 partly reflected while the remaining light transmitting the photomask 1 reaches wafer 2 through an imagery optical system 5 to be reflected on the wafer 2 reversing to the system 5 again to join with the reflected light on the photomask 1. At this time, the polarizing direction of the reflected light on the wafer 2 is rectangularly changed. Resultantly the polarized light with rectangularly changeable polarizing direction may be rectangularly changed through an objective lens 31 and lambda/2 plate 32 to reach an observation part 7 being reflected on another halfmirror 30, a roof prism 13 making visual alignment observation feasible. |
