| 摘要 |
PURPOSE:To form a strong film having good adhesion by leading sputtering atoms generated by crossed field discharge to the outside of a discharging device through an aperture of an anode and coating the inner wall face of a vacuum container. CONSTITUTION:When high voltage is applied between an anode 1 and a cathode 2 in a vacuum container, magnetron discharge is generated and continued at a part formed by the inner face of a tube, i.e. an anode, and the anode side surface of the cathode 2. The surface of the center of electrode 2b of the cathode 2 is made of a coating material, for instance, titanium, and ions generated by discharge collide with the electrode 2b and sputter the surface material. The sputtered material penetrates the aperture of the anode 1, goes to the outside of the anode 1, and deposits on the surface of solid around the anode 1 and cathode 2 and performs coating. Covers 16 are provided on supports 3, 5 that support the anode 1 and cathode 2 to protect the penetrated surface of the vacuum container from pollution due to sputtering atoms. |
