| 摘要 |
PURPOSE:To improve the cleanliness of a clean room in a convey separate system used between manufacturing process for a semiconductor wafer by configurating a device in such a manner that a designation indicated on a container which contains a part, can be discriminated and separated. CONSTITUTION:Containers 2a and 2b which contain parts, are conveyed by a first half conveyor belt 11. When the containers 2a and 2b arrive at a discriminator 3, the designation indicated on the containers 2a and 2b is discriminated allowing them to be input into a control device 5. The inputted signal enables the control device 5 to drive a separator 4 allowing arms 14a and 14b to hold the containers so as to separate them onto the stated latter half conveyor belt 12a and 12b. Then, the containers are allowed to be separated by means of a bridge 24. And the latter half conveyor belt 12a and 12b are driven after the containers have been separated and transferred. This configuration enables a part flow efficiency to be augmented and also enables a device to be unmanned allowing a cleanliness of a clean room to be improved. |
