| 摘要 |
PURPOSE:To obtain a silane compound in high yield with reduced energy consumption at low cost, by combining a fluidized bed reaction column with specific two reaction columns, a distillation column, etc., and producing continuously the silane compound from metallic silicon powder. CONSTITUTION:A silane compound is continuously produced by using the following three process. The first process: in the trichlorosilane synthesis column 1, metallic silicon powder is reacted with silicon tetrachloride and hydrogen to synthesize trichlorosilane. The second process: trichlorosilane obtained from the first process is disproportionated in the first reaction column 5 having distillation function in the presence of a disproportionation catalyst consisting of a mixture or a reaction product of a tertiary aliphatic hydrocarbon-substituted amine shown by the formula (R1-R3 are aliphatic hydrocarbon; R1-R3 have >=10 total carbon atoms, R1-R3 are the same or different) and hydrogen chloride, to give a column top component consisting essentially of dichlorosilane. The third process: the column head component of the first reaction column is diproportionated in the second reaction column 7 in the presence of the same catalyst as that used in the second process, to give a column top component consisting essentially of a monosilane as a main component.
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