| 摘要 |
PURPOSE:A heater that is made by encapsulating electrically heating elements through spacers into a tube resistant to solutions to be used in treatments so that it is supported by the spacer, thus preventing pin-hole formation. CONSTITUTION:In an encapsulation vessel 4 which is made of a material resistant to treating solutions such as etching solution such as a quartz pipe, an electrically heating elements such as nichrome wires 5 which is allowed to pass through spacers 8 such as bored quartz beads is placed and held. Thus, the encapsulation vessel is quite free from forming pin-holes by local heating whereby the treating solution does not come into the vessel 4 to prevent the heating elements and treating solutions from being contaminated.
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