| 摘要 |
PURPOSE:To effectively detect an improper mark by composing to variably set either one of inspecting light quantity of an inspecting light source and the reference reflecting light quantity of improper mark detecting means in response to the reflectivity of the surface of a pellet. CONSTITUTION:An improper pellet displayed with an improper mark on the surface, and an improper pellet displayed with an improper mark without forming of good pellet and circuit pattern not displayed with improper mark are provided on a circuit pattern 10 after a test is finished. A proper pellet discriminator 33 emits an inspecting light quantity 32 to each pellet, compares the reflected light quantity V1 from each pellet with a reference light quantity E1 by a comparator 35, and a discriminator 37 discriminates the improper pellet. A reference reflecting light quantity setter 36 sets the reference light quantity in response to the reflectivity of the pellet surface Thus, even if high and low reflectivity exists on the surface of the pellt, improper mark can be effectively detected with respect to the proper pellet. |
