| 摘要 |
PURPOSE:To obtain a miniature surface acoustic wave resonator having high Q by setting the cycles and spaces of a reflector and an electrode at about 1/2 length of a surface acoustic wave. CONSTITUTION:Both an inter-digital converter and a grating reflector are made of an aluminum thin film. The reflecting matter of the grating reflector has a 28.0mum cycle and about 14mum line width. While the inter-digital converter has a 27.66mum electrode cycle and about 14mum line width. The space between the electrode finger of the converter and the reflecting matter of the reflector is set at 28.0mum. Such an SAW resonator has 61.23MHz resonance frequency, 30OMEGA resonance frequency and 14,500 of Q respectively.
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