发明名称 DISCHARGE DEVICE OF GAS LASER
摘要 PURPOSE:To ensure arc discharge for preliminary ionization in individual preliminary ionization gaps, by providing one or a few preliminary ionization gaps in the discharge paths of a plurality of charging capacitors. CONSTITUTION:When a switch S is closed after capacitors C1-1-C1-N are charged, a discharge path in the order of the capacitor C1-1 the switch S a capacitor C2 a discharge gap 4-1 the capacitor C1-1 is formed with respect to the capacitor C1-1. The similar discharge paths are formed for the capacitors C1-2-C1-N through discharge gaps 4-2-4-N. Therefore, even if the impedances of the discharge gaps 4-1-4-N are not uniform due to dispersion in manufacturing quality and a gaseous atmosphere, a uniform preliminary ionization effect is obtained. Thus, the main discharge between electrodes 1 and 2 is efficiently carried out.
申请公布号 JPS61125095(A) 申请公布日期 1986.06.12
申请号 JP19840246815 申请日期 1984.11.21
申请人 KOMATSU LTD 发明人 KAJIYAMA KOICHI;YAMAGUCHI TADAYOSHI;MORO NORIO;ITOU NORIAKI;SAJIKI KAZUAKI
分类号 H01S3/038;H01S3/097;H01S3/0971 主分类号 H01S3/038
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