摘要 |
PURPOSE:To ensure arc discharge for preliminary ionization in individual preliminary ionization gaps, by providing one or a few preliminary ionization gaps in the discharge paths of a plurality of charging capacitors. CONSTITUTION:When a switch S is closed after capacitors C1-1-C1-N are charged, a discharge path in the order of the capacitor C1-1 the switch S a capacitor C2 a discharge gap 4-1 the capacitor C1-1 is formed with respect to the capacitor C1-1. The similar discharge paths are formed for the capacitors C1-2-C1-N through discharge gaps 4-2-4-N. Therefore, even if the impedances of the discharge gaps 4-1-4-N are not uniform due to dispersion in manufacturing quality and a gaseous atmosphere, a uniform preliminary ionization effect is obtained. Thus, the main discharge between electrodes 1 and 2 is efficiently carried out. |