发明名称 |
INTEGRATED CAPACITIVE TRANSDUCER. |
摘要 |
Disclosed is an electroacoustic transducer, such as a microphone, which may be integrated into a semiconductor chip and a method of fabrication. The semiconductor is etched to produce a membrane having a sufficiently small thickness and an area so as to vibrate at audio frequencies. Electrodes are provided in relation to the membrane so that an electrical output signal can be derived from the audio frequencies, or vice versa, due to variable capacitance. Preferably, the sensitivity of the device is made to be an approximately linear function of sound pressure level to be compatible with amplification. |
申请公布号 |
EP0137826(A4) |
申请公布日期 |
1986.06.05 |
申请号 |
EP19840901149 |
申请日期 |
1984.02.17 |
申请人 |
AMERICAN TELEPHONE AND TELEGRAPH COMPANY |
发明人 |
BUSCH-VISHNIAC, ILENE, JOY;LINDENBERGER, W. STEWART;LYNCH, WILLIAM, THOMAS;POTEAT, TOMMY, LEROY |
分类号 |
H04R19/00;H04R19/04;(IPC1-7):H04R31/00 |
主分类号 |
H04R19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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