| 摘要 |
PURPOSE:To obtain a liquid metal ion source power saving and having a long life by evaporating an ionization material while heating a store part and blowing said vapor against an anode for condensation in order to supply the ionization material. CONSTITUTION:A store part 2 for an ionization material is located near an anode 1 while being provided with a nozzle 3. The store part 2 can be heated by a heater 5 while the vapor 6 of the ionization material 4 is emitted from the nozzle 3 for being blown against the anode 1. Thereby, at the time of operation of an ion source, heating of the anode 1 alone suffices. When instability of ions is generated, the store part of the ionization material is heated in order to anew supply the ionization material to the anode 1. |
