| 摘要 |
PURPOSE:To enable the uniformity in power density of each discharge section to be contrived by a method wherein the electrode distance between a plurality of split electrodes and a common electrode is varied with the position of each electrode. CONSTITUTION:The distance from the part of lower impedance of the discharge section corresponding to each split electrode 5 to the common electrode 4 is set smaller, and the distance from the part of higher impedance of the discharge section is set larger; namely, when the split resistor 5 is composed of split resistor singles 5a, 5b, and 5c at the upper, middle, and lower steps, the lower step has a lower impedance, and the upper step has a higher impedance. Therefore, the distances l1, l2, and l3 between the common electrode are so set as to be smaller, medium, and larger, respectively. Then, application in the longitudinal direction brings a lower impedance at the end and a higher impedance at the center. Accordingly, the distances between the common electrode 4 are set larger at both ends and smaller at the center. |
