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发明名称
摘要
申请公布号
JPS61501119(A)
申请公布日期
1986.05.29
申请号
JP19850500846
申请日期
1985.02.01
申请人
发明人
分类号
H01L29/73;H01L21/331;H01L21/74;H01L21/76;H01L21/763;H01L27/04;H01L29/04;H01L29/08;H01L29/10;H01L29/267;H01L29/735
主分类号
H01L29/73
代理机构
代理人
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地址
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