| 发明名称 |
STRIPPING COMPOSITIONS AND METHOD OF STRIPPING RESISTS |
| 摘要 |
Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a tetrahydrothiophene 1,1-dioxide compound. Either or both of polyethylene glycol and a diethylene glycol monoalkyl ether may be added to provide even more effective stripping compositions. |
| 申请公布号 |
DE3270443(D1) |
申请公布日期 |
1986.05.15 |
| 申请号 |
DE19823270443 |
申请日期 |
1982.09.22 |
| 申请人 |
J.T. BAKER CHEMICAL CO. |
发明人 |
WARD, IRL EUGENE, JR.;HALLQUIST, LISA GAIL;HURLEY, THOMAS JOSEPH |
| 分类号 |
G03F7/42;(IPC1-7):G03F7/26 |
主分类号 |
G03F7/42 |
| 代理机构 |
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| 地址 |
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