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申请公布号
JPS6170929(U)
申请公布日期
1986.05.15
申请号
JP19840156773U
申请日期
1984.10.16
申请人
发明人
分类号
H01L21/205;H01L21/22;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/205
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