| 摘要 |
PURPOSE:To enable to measure accurately a linear form portion of a sample image, by detecting the angular deflection between the directions of he linear portion and the two-dimension scanning, and turning the two-dimension scanning direction of electron ray or the sample itself depending on the value of deflection. CONSTITUTION:When measuring a sample 10 which has mainly a linear construction, such as a semiconductive element, by using a sample image display system of a scanning type electron microscope, for example, the angular deflection between the directions of the linear form portion and the two-dimension scanning of the sample is detected by means of measuring an interval between two points where a scanning pattern, scanning on the linear portion crossing the point to be measured,crosses a specific threshold value. Upon the resultant value, a horizontal and vertical signal generators 2 and 3 are controlled through a memory 13 and a control unit 1, and the scanning direction of the electron ray 9 and the direction of the linear portion of the sample image are automatically united by driving a deflection coil 8. Therefore, it is possible to measure easily a width or an interval of a minute pattern. |
