| 摘要 |
PURPOSE:To improve the high temperature and high humidity resistance and to enable a pattern formation of a lead layer by etching by providing a ferro magnetic thin film of Fe-Ni system and the lead layer contg. Al for conducting electricity to the ferromagnetic thin film on a base. CONSTITUTION:The ferromagnetic thin film 25 consisting of Fe-Ni system material is formed with the prescribed pattern on the flat plate base 21 consisting of the material with nonmagnetism and electric insulation. Then, the lead layers 31, 35 are connected with electrode parts 255, 257 connected with a detecting part 251 of the thin film 25. The lead layers 31, 35 consisting of the material contg. Al is formed by sputtering or the like and formed to the prescribed pattern shape of the lead layer by etching. |
