| 摘要 |
PURPOSE:To improve reliability, to miniaturize the titled recording head and to enable super-precision recording by forming a heating resistance layer onto a substrate and shaping a transistor array constituting a driving circuit electrically connected to the heating resistance layer onto the substrate. CONSTITUTION:A heating resistance layer 7 by a compound such as ruthenium oxide is disposed previously onto a substrate 1, a drain electrode 2 is formed onto the upper surface of the heating resistance layer 7, and the drain electrode 2 is introduced to a heat generating section 8. A wiring for the drain electrode 2 is shaped to the heat generating section 8, a protective layer 11 for protection from ink is annexed to sections, to which a liquid chamber 9 and a liquid flow path 10 are formed, on the upper surface of the wiring, and a flow-path wall 12A using glass or a dry film, a shrouding wall 12B and a top plate 12C are shaped to the upper section of the layer 11. 13 represents an orifice from which ink droplets are discharged. |
