| 摘要 |
PURPOSE:To obtain an image having a constant contrast independently from inclination of a semiconductor pellet, by providing the pellet with a vapor- deposited aliminium surface having a constant diffuse reflection component so as to inhibit any regularly reflected light from entering into a microscope. CONSTITUTION:Aluminium is vapor deposited on a semiconductor pellet under a sufficient residual air pressure (3X10<-6>Torr or higher) to provide the deposited aluminium film with a satin-like surface having a reflection luminance higher than a predetermined value for all the radiation angles. Further, in order to observe the pellet, a tube 5 receiving a light source 3 and a condenser lens 4 therein is provided separately from a microscope lens barrel 1 and an object lens 2 so as to apply light obliquely to a semiconductor pellet 6 which is present within the visual field of the microscope and has the reflectivity of aluminium. |
