发明名称 POSITION DETECTING DEVICE
摘要 PURPOSE:To reduce strain caused by variation with time by a method wherein the strain of signals of time function ascribing to the response characteristic of a signal detecting means is corrected on the basis of the transmitting function of the signal detecting means which is previously being stored, and is then converted into the detection signals of positional function. CONSTITUTION:The signal detecting means 505 outputs time-series detection signals 504 corresponding to the scanning direction of a specific pattern 500. The first conversion means 511 converts the detection signals 504 into the first signals 510 of time function of the basis of clock pulse released from an oscillator 507. A strain correcting means 513 outputs the second signals 512 by correcting the strain of the first signals 510 ascribing to the response characteristic of the signal detecting means 505, on the basis of the transmitting function of the signal detecting means 505 being stored in a memory means 506. The second conversion means converts the second signals 512 into the detection signals 514 of positional function. A position detecting means 516 detects the position of the object 501 on the basis of a detecting means 514.
申请公布号 JPS6165436(A) 申请公布日期 1986.04.04
申请号 JP19840187765 申请日期 1984.09.07
申请人 NIPPON KOGAKU KK <NIKON> 发明人 IMAI YUJI;MURAKAMI SHIGEO
分类号 G03F9/00;H01L21/027;H01L21/30 主分类号 G03F9/00
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