| 摘要 |
PURPOSE:To adjust the angle of a head easily by forming a bimorph, in which two piezoelectric elements are laminated, and each shaping a first electrode on the support side of the piezoelectric element, second and third electrode sections to a nose section and a single intermediate electrode to a laminating surface. CONSTITUTION:A bimorph 1 is shaped by laminating piezoelectric elements 1a and 1b, a first electrode 2 is formed on the support section sides of the outer side surfaces of the piezoelectric elements 1a, 1b, a second electrode 3 is shaped similarly to the nose sections of the piezoelectric elements 1a, 1b, a third electrode is formed to the nose sections in the same manner, and the electrodes 2-4 and extending sections 3a, 4a are shaped to both external surfaces of the piezoelectric elements 1a and 1b. An intermediate electrode 5 is formed onto the whole surface of the laminating surface of the piezoelectric elements 1a and 1b, and the both external surfaces of the electrodes 2-4 are connected mutually. The arrow represents the direction of polarization of the piezoelectric elements 1a, 1b. Regarding operation, the piezoelectric elements 1a, 1b are extended when the same potential as the direction of polarization is applied, and they are shrunk in reverse case. Consequently, the elements are moved in the warping direction toward the nose sections from a susceptor 6 by voltage V1, and operated in the twisting direction by voltage V2. Accordingly, the direction of deflection and the direction of warpage can be selected freely by the polarity and voltage value of voltage V1, V2. |
