发明名称 FABRICATION OF DEVICES INVOLVING LITHOGRAPHIC PROCEDURES
摘要 <p>Process for fabrication of devices utilizing novel extremely useful compositions for delineation of materials. These compositions include a polymer having segments that are at least (10) monomer units long of a first entity and segments again at least (10) monomer units long of a second entity. The monomer units are chosen so that each segment type provides a specific chemical characteristic to the polymer.</p>
申请公布号 WO1986001616(A1) 申请公布日期 1986.03.13
申请号 US1985001056 申请日期 1985.06.05
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