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发明名称
ION BEAM SOURCE
摘要
申请公布号
EP0111129(A3)
申请公布日期
1986.03.12
申请号
EP19830110680
申请日期
1983.10.26
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CUOMO, JEROME JOHN;HARPER, JAMES MCKELL EDWIN;WATERS, GARY ALEXANDER
分类号
C23F4/00;C23C14/46;H01J27/02;H01J27/08;H01J37/08;H01J37/305;H01J37/317;H01L21/265;H01L21/302;(IPC1-7):H01J27/02
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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