| 摘要 |
PURPOSE:To perform degassing operation with good efficiency by mounting an object glass output means and a sample contamination preventive means en bloc through an insulator. CONSTITUTION:A filament conductor is composed inside an insulator 13 around a spacer 7 uniting object glass magnetic poles 6 and 8 for making it to operate as a heater 14. The outside of the insulator is coated with a metal conductor, for instance, with copper. According to said constitution, a heating means and a sample contamination preventive conductor 12 through a cooling agent are able to be mounted simultaneously. The temperature of the object glasses are raised to about 120-150 deg.C for performing output operation while meanwhile continuously performing exhaustion. When further holding clean high vacuum, the conductor 12 is cooled down to the temperture of a liquid nitrogen liquid while condensation gas and moisture are made to be trapped thus enabling a clean high vacuum state to be maintained. In this way, degassing operation can be performed with good efficiency. |
