发明名称 LASER LIGHT TRIMMING DEVICE
摘要 PURPOSE:To provide a titled device which improves inexpensively treating capacity in repetitive irradiation of laser light by a measuring control part by dividing equally the laser light and trimming successively plural work pieces regardless of circuit stabilizing time by an optical shutter. CONSTITUTION:The laser light 3a is subjected to measurement (c) and calculation (d) by an inspection signal 9 after wating for the stabilizing time (b) of electric circuits when the input (a) for setting conditions is made to the measuring control part 8. Such laser light is passed through an optical scanner 5 and irradiates (e) repeatedly the work piece 6a on a base plate 7a until the prescribed inspection value 9a is attained. The laser light 3 is equally divided 3a, 3b by the beam splitter 4 and the start (f) and end (g) of the trimming of the work piece 6a by the optical shutter 12a are known from the output 63 of a sensor 62 for the like reflected from an aluminum mirror 50 by the electromagnetic scanner 30 of the shutter 12. The electromagnetic scanner 30 of the shutter 12 is immediatedly operated to advance rectilinearly 3p the beam 3b, thereby trimming the work piece 6b. The trimming is successively executed regardless of the time (b).
申请公布号 JPS6133786(A) 申请公布日期 1986.02.17
申请号 JP19840155368 申请日期 1984.07.27
申请人 HITACHI LTD 发明人 ASAI OSAMI;URUSHIBARA TAKESHI;HOSOGAI TOSHIO;TSUJI MIKIHIKO
分类号 B23K26/00;B23K26/06;B23K26/067;H01C17/242 主分类号 B23K26/00
代理机构 代理人
主权项
地址