| 摘要 |
PURPOSE:To prevent deterioration in quality of coating due to peeling off of a deposit for coating and adhering to a work to be processed to form coating by providing a temperature controllable adhesion prevention board and an adhesion prevention unit using a mesh inside of a coating forming device such as a vacuum evaporating device etc. CONSTITUTION:Substance from an evaporation source 5 is stuck on the surface of a substrate 4 in a vacuum container by vaccum evaporation process, spatter process, CVD process etc. In this case evaporated substance from the evaporation source 5 adheres and accumulates on inner face of a container 3 and exfoliates and adheres on the surface of the substrate 4 and lowers the quality of coating on the face of the substrate. To prevent this, an adhesion prevention board 8 provided with a heater 10 and an adhesion prevension unit 7 made by attaching a mesh to the board are installed in the container 3. Excess evaporated substance from the evaporation source 5 is made to adhere on the adhesion prevention board 8 heated by the heater 10. Even when the adhered substance exfoliates, adhesion on the surface of the substrate 4 is prevented by the mesh 11, and deterioration in the quality of coating on the face of the substrate is prevented. |
