POSITIONING AND CONTROLLING PROCEDURE OF A WORKPIECE PROVIDED WITH PATTERNS, FOR EXAMPLE OF A MASK FOR MANUFACTURING SEMI-CONDUCTOR ELEMENTS,申请号EP19810109166-传众专利搜索

发明名称	POSITIONING AND CONTROLLING PROCEDURE OF A WORKPIECE PROVIDED WITH PATTERNS, FOR EXAMPLE OF A MASK FOR MANUFACTURING SEMI-CONDUCTOR ELEMENTS
摘要
申请公布号	EP0054710(B1)	申请公布日期	1986.02.05
申请号	EP19810109166	申请日期	1981.10.29
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	BENJAMIN, CHARLES EPHRAIM;CRAWFORD, DAVID JAMES;DAVIS, DONALD EUGENE;MOORE, RICHARD DAVID;RYAN, PHILIP MEADE;WEBER, EDWARD VICTOR
分类号	G03F1/00;H01J37/304;(IPC1-7):H01J37/304;G03B41/00	主分类号	G03F1/00
代理机构		代理人
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