TORCH

摘要

TORCH A reactant deposition torch has a plurality of concentric glass tubes. Various gases pass through the tubes while particle producing reactants pass through the inner tube. The concentricity of the tubes is accurately maintained by a plurality of precision machined splines located on the outer periphery of the inner and intermediate tubes. Additionally, the inner tube is movable in the axial direction during the deposition process to controllably alter the amount of reactant to be deposited.