SEMICONDUCTOR MANUFACTURING DEVICE

摘要

PURPOSE:To effect the exchange of the sort of substances to be proccessed which differ in height easily and rapidly by providing an autofocusing means which can attain focusing of the substance to be processed automatically according to the height of said substance. CONSTITUTION:A controlling part 8 controls both of pulse motors 7 and 12 relatively and then the automatic adjustment of positions in height of a tool 3 and a camera 9 can be made arbitrarily. Also, the control part 8 comprises the functions of automatic focusing and magnification preset which effect preset of a focus and a magnification of the camera 9 automatically. When an original position of the tool 3 is preset, number of pulses of up-down movement of the tool 3 caused by actuation of a pulse motor 7 is given to a pulse motor 12 through the control part 8 and the pulse motor 12 is driven only by the desired quantity. Consequently, the camera 9 and a lens barrel 10 are moved up and down automatically according to the height of a pellet 1 as a work and focusing of the camera 9 for the pellet 1 can be effected automatically.