TWO-FLOW MOLECULAR VACUUM PUMP

摘要

FIELD: vacuum building devices for different production systems. SUBSTANCE: pump housing accommodates electric motor, gas dynamic support, rotor with spiral grooves. Disks of axial bearing of gas dynamic support are pressed by springs to fixed axle. Rotor is provided with spiral grooves. Viscous stage plays simultaneously the part of radial gas dynamic bearing. Springs pressing the disks of axial bearing create angular moment smaller than limit angular moment developed by gas dynamic bearing. EFFECT: enlarged operating capabilities. 1 dwg-